Solid-Phase Crystallization of As-doped Amorphous Ge on Glass Leading to High Electron Mobility

Presentation information

Oral presentation

13 Semiconductors » 13.4 Si processing /Si based thin film / MEMS / Equipment technology

Wed. Sep 18, 2019 9:30 AM - 11:45 AM E304 (E304)

Seiichiro Higashi(Hiroshima Univ.), Tatsuya Okada(Univ. of the Ryukyus)

11:15 AM - 11:30 AM

〇Masaya Saito¹, Kenta Moto¹, Takeshi Nishida¹, Takashi Suemasu¹, Kaoru Toko¹ (1.Univ. of Tsukuba)

Keywords:Ge, thin film semiconductor, solid-phase crystallization