The 80th JSAP Autumn Meeting 2019

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15 Crystal Engineering » 15.4 III-V-group nitride crystals

[18a-E310-1~10] 15.4 III-V-group nitride crystals

Wed. Sep 18, 2019 9:00 AM - 11:45 AM E310 (E310)

Mitsuru Funato(Kyoto Univ.), Yoshiki Saito(TS Opto)

10:45 AM - 11:00 AM

[18a-E310-7] Growth of AlGaN films on annealed MOVPE-grown AlN templates

〇Shigeyuki Kuboya1, Yuta Tezen1, Kenjiro Uesugi1, Kenji Norimatsu1, Kanako Shojiki2, Hideto Miyake2,3 (1.SPORR, Mie Univ., 2.Grad. School of Eng., Mie Univ., 3.Grad. School of RIS, Mie Univ.)

Keywords:Nitride semiconductor, AlN, AlGaN