[18a-PB3-1~47] 15.4 III-V-group nitride crystals

[18a-PB3-37] Growth and coalescence of grains during the CVD of h-BN thin films

〇Tomoyasu Nakama¹, Kazuki Matsushita¹, Taira Watanabe¹, Hiroko Kominami¹, Kazuhiko Hara^2,3 (1.GSIST Shizuoka univ., 2.GSST Shizuoka univ., 3.RIE Shizuoka univ.)

Keywords:h-BN, CVD, sapphire substrate