[18a-PB3-1~47] 15.4 III-V-group nitride crystals

[18a-PB3-7] MOVPE growth of AlGaN multiple quantum wells on HT-annealed AlN templates

〇Kazuki Kawabata¹, Shigeyuki Kuboya², Kenjiro Uesugi², Kanako Shojiki¹, Hideto Miyake^1,3 (1.Grad. School of Eng, Mie Univ., 2.SPORR, Mie Univ., 3.Grad School of RIS, Mie Univ.)

Keywords:HT-annealed AlN, MOVPE, AlGaN