The 80th JSAP Autumn Meeting 2019

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6 Thin Films and Surfaces » 6.6 Probe Microscopy

[18p-C310-1~14] 6.6 Probe Microscopy

Wed. Sep 18, 2019 1:30 PM - 5:15 PM C310 (C310)

Takashi Ichii(Kyoto Univ.), Yoichi Otsuka(Osaka Univ.)

4:00 PM - 4:15 PM

[18p-C310-10] Evaluation of the Surface Properties of a PVA Brush for Cleaning Semiconductor Wafer by AFM in Liquids.

〇Takahiko Ikarashi1, Takumi Yoshino1, Kazuki Miyata1,2, Keisuke Miyazawa1,2, Megumi Uno3, Chikako Takatoh3, Takeshi Fukuma1,2 (1.Grad. School, Kanazawa Univ., 2.WPI-NanoLSI,Kanazawa Univ., 3.EBARA corp.)

Keywords:AFM, PVA