The 80th JSAP Autumn Meeting 2019

Presentation information

Oral presentation

13 Semiconductors » 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

[18p-E303-1~11] 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

Wed. Sep 18, 2019 1:45 PM - 4:45 PM E303 (E303)

Nobuya Mori(Osaka Univ.)

4:15 PM - 4:30 PM

[18p-E303-10] TCAD Simulation of Phonon Thermal Transport in MOSFETs on the Basis of Boltzmann Equation

Junichi Hattori1, Tsutomu Ikegami1, Koichi Fukuda1 (1.AIST)

Keywords:thermal transport, phonon, TCAD