[18p-E308-1~18] 17.2 Graphene

[18p-E308-13] Gas Sensing Responses of Membrane-type Surface stress Sensor (MSS) Coated with Graphene Oxide

〇Gaku Imamura¹, Kosuke Minami¹, Kota Shiba¹, Seiji Obata², Genki Yoshikawa^1,3, Koichiro Saiki⁴ (1.NIMS, 2.Okayama Univ., 3.Univ. of Tsukuba, 4.Univ. of Tokyo)

Keywords:graphene oxide, nanomechanical sensor, membrane-type surface stress sensor (MSS)

A nanomechanical sensor is a chemical sensor that detects changes in mechanical properties (e.g. deflection, stress) induced by expansion/shrinkage of a receptor layer associated with gas sorption/desorption. In this study, we employed graphene oxide (GO) as a receptor material of a Membrane-type Surface stress Sensor (MSS), that is a kind of nanomechanical sensors, and evaluated its sensing properties. The experimental results showed that GO-coated MSS exhibited high sensitivity and high selectivity to hydrophilic gas species.