[18p-E317-1~11] 9.1 Dielectrics, ferroelectrics

△ [18p-E317-5] HBAR type transformers with ScAlN multilayer for rectifying antenna

〇(M1)Sarina Kinoshita^1,2, Takahiko Yanagitani^1,2,3 (1.Waseda Univ., 2.ZAIKEN, 3.JST-PREST)

Keywords:piezoelectric transformer, piezoelectric thin film, ScAlN

The RF energy harvesting from surrounding electromagnetic wave is generally achieved by RF-DC conversion using a rectifying antenna. However, the diode in the rectenna cannot be activated efficiently by a weak RF signal. In this study, we propose HBAR type transformers with ScAlN multilayer to overcome this problem. Voltage gain approaching + 20 dB with the 4 layers HBAR type transformer is observed.