[18p-N304-1~15] 3.7 Laser processing

△ [18p-N304-11] Laser Microfabrication by Tightly Focused Vector Beams

〇Masaki Sato¹, Yuichi Kozawa¹, Shunichi Sato¹ (1.IMRAM, Tohoku Univ.)

Keywords:vector beam, microfabrication, femtosecond laser

Tightly focused higher-order radially polarized mode beam can form a small focal spot predominantly composed of the strongly longitudinal electric field. Such characteristics have the potential to be utilized for ultra-fine and further precise laser processing. In this report, we examine the structures fabricated by single-shot laser processing with higher-order transverse mode beams with various polarizations.