[18p-N304-1~15] 3.7 Laser processing

△ [18p-N304-9] Linking the laser ablated morphology with the local fluence

〇Haruyuki Sakurai¹, Kuniaki Konishi¹, Hiroharu Tamaru¹, Junji Yumoto¹, Makoto Kuwata-Gonokami¹ (1.The Univ. of Tokyo)

Keywords:laser processing, ultrafast laser

We introduce the development of a new method to directly correlate a processing laser beam profile to the laser ablated morphology. We measure the beam profile at the laser focus, as well as the morphology of the ablated region. By directly correlating the spatial location of these two data, we are able to obtain relationships between the local incident fluence and the ablated depth.