[18p-PA4-1~25] 6.2 Carbon-based thin films

△ [18p-PA4-20] Fabrication and evaluation of diamond SBD using Minimal fab

〇(P)Takanori Hanada¹, Hitoshi Umezawa², Shinya Ohamagari², Daisuke Takeuchi², Nemoto Kazumasa^2,3, Sommawan Khumpuang^2,3, Shiro Hara^2,3, Junichi Kaneko¹ (1.Hokkaido Univ., 2.AIST, 3.MINIMAL)

Keywords:Diamond, Minimal fab, Schottky Barrier Diode