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[18p-PA4-24] Laser-induced conductive layer on singlecrystalline diamond
Keywords:laser-induced doping, diamond, boron
Diamond represents a promising wide- bandgap semiconductor for high power electronic devices. However, devices have not been realized due to difficulties in the doping process physically and technically. Recently laser irradiation has been a prime candidate as a new doping technique. In this work, we applied the laser-induced doping to singlecrystalline diamond immersed in dopant acid.