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[18p-PA5-4] Preparation of titanium- and tungsten-doped vanadium oxide films for bolometer infrared sensors
Keywords:bolometer, infrared sensor, vanadium oxide
We newly fabricated the Ti- and W-doped vanadium oxide (VO2) films for bolometric infrared sensors. In this study, we tried to optimize the Ti and W doping content in VO2 films and investigated their electrical properties.