[18p-PA5-1~22] 6.4 Thin films and New materials

[18p-PA5-7] Dewetting Phenomena and Self-organization of Ag/Ti and Au/Ag/Ti Films on Si Oxide Substrates

〇Masao Kamiko¹, Sangbum Nam², Inyong Hwang², Yoshitaka Mitsuda¹, Jae-Geun Ha² (1.IIS, The Univ. of Tokyo, 2.Kwangwoon Univ.)

Keywords:Metallic Thin Films, Dewetting, Nanodot

The aim of our study is to fabricate the self-organized metallic nanodots onto various substrate through the dewetting (thermal agglomeration) phenomenon. It would be interesting to study how the dewetting process varies with different film structure. We compare in this study the dependence of the dewetting behavior of Ag/Ti and Au/Ag/Ti films deposited onto an amorphous SiO₂ substrate on the post-annealing condition.
The samples were deposited by DC magnetoron sputtering and were post-anneal at 350 °C–450 °C under the vacuum condition. The thickness of Ag and Au/Ag layers was set to 5 nm. Self-organized nanodot formations of Ag, and Au/Ag on a Ti seed layer (1 nm) coated SiO₂ substrate after annealing were observed by AFM measurements. The dewetting progressing speed of Au/Ag/Ti film was slightly faster than that of Ag/Ti film. XPS results revealed that the composition ratio of nanodots fabricated by dewetting of the Au/Ag bilayer film was almost Au₅₀Ag₅₀.