[18p-PB5-1~36] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[18p-PB5-17] Investigation of flat thin film growth conditions of ZnO by ALD

〇Ryo Yamamoto¹, Hiroto Kano², Atsushi Nakamura¹, Wataru Inami¹ (1.Shizuoka Grad., 2.Shizuoka Univ.)

Keywords:Atomic Layer Deposition, zinc oxide thin film