[18p-PB5-1~36] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[18p-PB5-20] Control of carrier concentration of Ga-doped ZnO thin film by Zn diffusion

〇(D)Rei Sugiura¹, Yumika Yamada¹, Yuki Asano¹, Shuhei Funaki¹, Yasuji Yamada¹ (1.Shimane Univ.)

Keywords:Zinc Oxide, anneal