10:30 AM - 10:45 AM
[19a-E312-5] Effect of Hydrogen on the Properties of BCN Films Prepared by Magnetron Sputtering
Keywords:BCN, Hydrogen, Magnetron sputtering
Oral presentation
6 Thin Films and Surfaces » 6.2 Carbon-based thin films
Thu. Sep 19, 2019 9:30 AM - 12:00 PM E312 (E312)
Masami Aono(Kagoshima Univ.), Hidetoshi Saitoh(Nagaoka Univ. of Tech.)
10:30 AM - 10:45 AM
Keywords:BCN, Hydrogen, Magnetron sputtering