The 80th JSAP Autumn Meeting 2019

Presentation information

Oral presentation

3 Optics and Photonics » 3.7 Laser processing

[19a-N304-1~10] 3.7 Laser processing

Thu. Sep 19, 2019 9:00 AM - 11:45 AM N304 (N304)

Yoshie Ishikawa(AIST), Masayuki Kakehata(AIST)

9:45 AM - 10:00 AM

[19a-N304-4] Fabrication of Micro-Suction Cup Structure on Silicone Rubber by ArF Excimer Laser

Masayuki Okoshi1, Tsuyoshi Yoshida1 (1.National Defense Academy)

Keywords:silicone rubber, micro-suction cup structure, ArF excimer laser

Periodic micro-suction cup structure of silicone approximately 1 micron diameter and 2 micron height at regular intervals of 2.5 micron was directly fabricated by ArF excimer laser. The laser was focused on Al-coated silicone by each silica microsphere 2.5 micron diameter, which covered the entire surface. The silicone underneath each microsphere photochemically swelled, after laser-ablating aluminum to limit a diameter of the swelling. Also, the aluminum enabled to adjust a focal point to the surface of silicone to form a hole approximately 0.5 micron diameter centered at each the swelled silicone. The fabricated micro-suction cup structure of silicone showed superhydrophobicity.