[19p-B01-1~6] Power Electronics and Technology of Thin Films - Surfaces. For realization of low energy consumption society

[19p-B01-3] Control of Polymorphism in Growth of Gallium Oxide Crystals

〇Shizuo Fujita¹ (1.Kyoto Univ.)

Keywords:gallium oxide, corundum, mist CVD

Gallium oxide takes various crystal phases, and the knowledge how to realize the target phase is an important subject both from the academic and applicational viewpoints. In the talk, focusing on corundum-structured α-type gallium oxide, the author wishes to discuss the physics and chemistry for the control of polymorphism paying attention to the crystal structutre of substrates, growth methods, and growth mechanism.