[19p-B11-1~8] Interfacial Nano Electrochemistry - Diversification of Semiconductor Wet Process

[19p-B11-2] Wet Etching of III-V Compound Semiconductors
– Focusing a Recent Topics on Nitride Semiconductors –

〇Taketomo Sato¹, Masachika Toguchi¹ (1.RCIQE, Hokkaido Univ.)

Keywords:III-V compound semiconductors, wet etching, electrochemical reactions