The 80th JSAP Autumn Meeting 2019

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Symposium (Oral)

Symposium (technical) » New development of surface and interface evaluation methods for thin films

[19p-B31-1~8] New development of surface and interface evaluation methods for thin films

Thu. Sep 19, 2019 1:15 PM - 5:15 PM B31 (B31)

Toshiyuki Kawaharamura(Kochi Univ. of Tech.), Hiroaki Nishikawa(Kindai Univ.)

1:15 PM - 1:45 PM

[19p-B31-1] Relationships between Chemical Bonding in Oxide Ferroelectrics and Characteristics of their Aerosol Deposition

〇Yoshihiro KUROIWA1 (1.Hiroshima Univ.)

Keywords:Aerosol Deposition Method, Ferroelectrics, Electron Density Distribution

ガラス基板上に製膜された酸化物強誘電体AD膜に対して放射光Ｘ線回折実験を行い，成膜の仕組みを原材料粉の化学結合の特徴から議論した結果を紹介する．