[19p-B31-1~8] New development of surface and interface evaluation methods for thin films

[19p-B31-6] Evaluation of surfaces and interfaces of semiconductors using THz emissions

〇Iwao Kawayama¹ (1.Osaka Univ.)

Keywords:Terahertz wave, semiconductor, interface

Laser terahertz (THz) emission microscopy/spectroscopy (LTEM/LTES) is a non-contact evaluation technique based on THz emission spectroscopy and imaging that can visualize intensity of pulsed terahertz radiations from the materials and devices excited by femtosecond laser pulses. LTEM/LTES enables the visualization of the dynamic responses of photoexcited carriers in a sample. We have applied this technique to characterize various materials and devices for far and clarified the potential of LTEM/LTES as a novel inspection technique.I will introduce our recent results that LTEM/LTES can detect defects, damage, interface polarizations of semiconductors.