[19p-C212-1~6] Advanced optical measurements in the field of organic electronics

[19p-C212-4] Multi-dimensional spectral imaging of surface and interface in device structures using operando scanning photoelectron microscopy with synchrotron soft X-rays

〇Naoka Nagamura^1,2 (1.NIMS, 2.JST PRESTO)

Keywords:spectroscopy, operando, imaging

Non-destructive imaging analysis in ultra-high resolution (time, space, energy) is available using synchrotron radiation X-rays, which have high brilliance, high directivity, and wide range of accessible wavelengths. We have developed an operando X-ray scanning photoelectron microscopy equipment with a voltage application system, called "3D nano-ESCA". We use it for surface/interface analysis of semiconductor device microstructures and catalyst / cell functional nanostructures during device operation. In my talk, I will introduce the details of the device and several examples of applications (organic FET etc.).