3:45 PM - 4:00 PM
[19p-C213-9] [Highlight] Mask-less patterning for superconducting circuits using focused ion beam
Keywords:superconductor, FIB, CVD
Oral presentation
11 Superconductivity » 11.1 Fundamental properties
Thu. Sep 19, 2019 1:30 PM - 6:30 PM C213 (C213)
Toshinori Ozaki(Kwansei Gakuin Univ.), Masanori Nagao(Univ. of Yamanashi), Shigeyuki Ishida(AIST)
3:45 PM - 4:00 PM
Keywords:superconductor, FIB, CVD