[19p-E206-1~19] 3.15 Silicon photonics

[19p-E206-5] Numerical analysis of taper-less hybrid MOS optical phase shifter

〇(M1)Shuhei Ohno¹, Qiang Li¹, Shinichi Takagi¹, Mitsuru Takenaka¹ (1.Univ. of Tokyo)

Keywords:optical phase shifter

III-V/Si hybrid metal-oxide-silicon (MOS) optical phase shifter has a big potential for application to photonic integrated circuit (PIC) based on silicon photonics. This phase shifter needs taper structure to connect phase shifter and silicon waveguide without insertion loss. However, it prevents from miniaturization of phase shifter. To remove taper structure, III-V layer needs to be thinner. In this study, we numerically investigated the feasibility of taper-less hybrid MOS optical phase shifter.