Importance of Improving Sputtered-MoS<sub>2 </sub>Film Quality in Sulfurization Process

Presentation information

Oral presentation

17 Nanocarbon Technology » 17.3 Layered materials

Thu. Sep 19, 2019 1:15 PM - 4:45 PM E308 (E308)

Masaki Tanemura(Nagoya Inst. of Tech.), Takayuki Arie(Osaka Pref. Univ.)

2:45 PM - 3:00 PM

〇Shinya Imai¹, Masaya Hamada¹, Satoshi Igarashi¹, Iriya Muneta¹, Kuniyuki Kakushima¹, Kazuo Tsutsui¹, Hitoshi Wakabayashi¹ (1.Tokyo Tech)

Keywords:MoS2, sputtering, sulfurization process