[19p-E308-1~13] 17.3 Layered materials

△ [19p-E308-8] Direct Observation of Physical Parameters for the Growth of Monolayer WS₂ by In-situ Monitoring

〇Tomoya Kameyama¹, Chao Li¹, Toshiro Kaneko¹, Toshiaki Kato^1,2 (1.Tohoku Univ., 2.JST-PRESTO)

Keywords:TMD, WS2

Monolayer TMD has been expected as next generation 2D materials because of their outstanding optoelectronic properties. For applying optoelectronic devices, it is important to understand the detailed growth mechanism. In this study, the quantitative studies of monolayer WS₂ crystal growth were precisely conducted by introducing in-situ monitoring. As the results of monitoring, physical parameters such as lifetime and growth rate of monolayer WS₂ were successfully revealed experimentally.