The 80th JSAP Autumn Meeting 2019

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9 Applied Materials Science » 9.2 Nanoparticles, Nanowires and Nanosheets

[19p-E317-1~20] 9.2 Nanoparticles, Nanowires and Nanosheets

Thu. Sep 19, 2019 1:15 PM - 6:45 PM E317 (E317)

Naoki Fukata(NIMS), Shinya Kano(AIST), Tegi Kim(Osaka City Univ.)

2:30 PM - 2:45 PM

[19p-E317-6] Formation of High Density FeSi Nanodots Induced by Remote H2-Plasma Exposure

〇Yasushi Hashimoto1, Katsunori Makihara1, Akio Ohta1, Mitsuhisa Ikeda1, Seiichi Miyazaki1, Atsushi Kohno2 (1.Nagoya Univ., 2.Fukuoka Univ.)

Keywords:magnetic nanodots, remote H2 plasma, iron silicide