[19p-E318-1~10] 7.1 X-ray technologies

[19p-E318-1] Fabrication and evaluation of laminar-type W/C multilayer diffraction gratings designed for high-spectral-flux in 200–900 eV range

〇Tadashi Hatano¹, Masato Koike², Masami Terauchi¹, Alexander S. Pirozhkov², Nubukazu Hayashi³, Hiroyuki Sasai³, Tetsuya Nagano³ (1.IMRAM, Tohoku Univ., 2.QuBS, QST, 3.Device Dept., Shimadzu)

Keywords:diffraction grating, diffraction efficiency, multilayer

Diffraction efficiency of a Au coated soft X-ray grating designed for Fe L-emission (705 eV) was measured before and after W/C multilayer overcoat. The highest value of 7.09% was obtained, which is 66% of a diffraction efficiency given by numerical calculation. Improvement due to W/C multilayer overcoat was confirmed over wide energy range around Fe L-emission.