[19p-PA2-1~9] 3.7 Laser processing

△ [19p-PA2-5] Reductive patterning of glyoxylic acid metal complex using multi-photon absorption

〇Tomoyuki Imakita¹, Akira Uetsuki², Tomoji Ohishi², Mizue Mizoshiri¹ (1.Nagaoka Univ. of Tech., 2.Shibaura Inst. of Tech.)

Keywords:direct writing, glyoxylic acid metal complex, reduction

Glyoxylic acid Sn (GASn) and Co (GACo) complexes were directly reduced using green femtosecond laser reduction in air to form Sn and Co micropatterns, respectively. Absorption spectra of both GASn and GACo complexes exhibited high transmittance at the wavelength of green femtosecond laser pulses (515 nm) and intense absorption at the half of the wavelength. Line patterns were formed from GASn and GACo complexes, and were analyzed using EDS mapping. The both lines consisted of Sn and Co without significant oxidation. This direct writing technique apply for fabrication of microelectromechanical systems.