The 80th JSAP Autumn Meeting 2019

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Poster presentation

6 Thin Films and Surfaces » 6.1 Ferroelectric thin films

[19p-PA3-1~9] 6.1 Ferroelectric thin films

Thu. Sep 19, 2019 1:30 PM - 3:30 PM PA3 (PA)

1:30 PM - 3:30 PM

[19p-PA3-6] Fabrication of Ba(Zr1-xTix)O3 film by reactive sputtering method using oxygen spray

〇Ao Makino1, Takayuki Shinohara1, Yuki Sunaoka1, Ken Nishida1 (1.National Defense Academy)

Keywords:Ba(Zr1-xTix)O3