[19p-PB1-1~34] 12.7 Biomedical Engineering and Biochips

△ [19p-PB1-14] Photosensitivity Improvement of Filter-Free Fluorescence Sensor in Short-Wavelength Region using ITO as Photogate

〇(M2)Takuya Teshima¹, Yong-Joon Choi¹, Yoshiko Noda¹, Sachiko Kamiya¹, Daisuke Akai¹, Takeshi Hizawa¹, Kazuhiro Takahashi¹, Hiromu Ishii¹, Toshihiko Noda¹, Kazuaki Sawada¹ (1.Toyohashi University of Technology)

Keywords:fluorescence, bio sensor, ITO

In this paper, we describe the development of a filter-free fluorescence sensor that can discriminate lights of short wavelength (400 nm or less). This sensor has a photogate structure, and the excitation light and the fluorescence can be simultaneously incident to calculate the respective light intensities. By changing the polysilicon used for the gate electrode to ITO, the absorption of short wavelength light by the gate electrode can be suppressed, and the separation of 365 nm and 405 nm light, which was impossible with the conventional structure, was successful.