[19p-PB1-1~34] 12.7 Biomedical Engineering and Biochips

[19p-PB1-27] Development of FET-based Sensing Device for Dissolved Oxygen and pH

〇SYLVIAMEILIN LOO¹, Yuya Sugihara¹, Takeshi Hizawa¹, Yoshiko Noda², Sachiko Kamiya¹, Kensuke Murakami¹, Youna Lee¹, Kazuhiro Takahashi^1,2, Toshihiko Noda^1,2, Kazuaki Sawada^1,2 (1.Toyohashi Univ., 2.EIIRIS)

Keywords:dissolved oxygen, tin oxide, ISFET

Oxygen is important to aerobic organisms. By visualizing the dissolved oxygen (DO) and pH changes in living organisms, we can understand the function of biological mechanisms. This paper investigates the oxygen sensing properties of Tin Oxide (SnO₂) thin-film in liquids by fabricating a flat-type ISFET(DO-ISFET) using SnO₂ as its DO-sensitive membrane. At the same time a pH sensing ISFET (pH-ISFET) was fabricated and both their pH and DO properties were investigated. In a pH 6 solution, the DO-ISFET showed significant response to changes in DO while the pH-ISFET showed minimal response, proving that DO-sensing is possible using the fabricated DO-ISFET.