[19p-PB7-1~16] 12.1 Fabrications and Structure Controls

[19p-PB7-7] Vapor depositing polymer thin films of a silsesquioxane derivative

〇Yamato Ogawa¹, Hiroaki Usui¹ (1.Tokyo Univ. Agri. & Tech.)

Keywords:vapor deposition, thin film, silsesquioxane derivative

Silsesquioxane derivatives are characteristic functional materials having mechanical strength, thermal stability, high dielectric constant, etc. due to their specific structure. In this study, we attempted to prepare polymer thin films by depositing silsesquioxane derivatives with vinyl groups using a vacuum deposition method. Evaluation of the produced thin film by IR measurement revealed that the polymerization was in progress, and it was found that a polymer thin film was obtained by vacuum deposition.