[20a-B11-1~10] 8.1 Plasma production and diagnostics

[20a-B11-7] Spatially resolved measurement of bremsstrahlung spectrum in a pure helium atmospheric pressure glow discharge

〇Motonao Nagasaki¹, Taiichi Shikama¹, Yohei Ueno¹, Masahiro Hasuo¹ (1.Kyoto univ.)

Keywords:atmospheric pressure plasma, bremsstrahlung, spectroscopy

Electron temperature and density of atmospheric pressure plasma can be estimated by the bremsstrahlung spectrum in the UV and visible range. However, measurement errors may occur because of gas composition or the spatially integrated spectrum. In this research, we measured spatially resolved bremsstrahlung spectrum in a pure helium atmospheric pressure glow discharge. As a result, spatial dependence of spectrum shape was observed. This result suggests that electron temperature and density of atmospheric pressure plasma have spatial distribution.