Development of ToF-RBS and -ERDA simultaneous measurements with FIB

Presentation information

Oral presentation

7 Beam Technology and Nanofabrication » 7.5 Ion beams

Fri. Sep 20, 2019 9:00 AM - 12:15 PM E203 (E203)

Junichi Yanagisawa(Univ. of Shiga Pref.), Satoshi Ninomiya(Univ. of Yamanashi)

10:00 AM - 10:15 AM

〇Satoshi Abo¹, Takuya Fujimoto¹, Fujio Wakaya¹ (1.Osaka Univ.)

Keywords:nondestructive analysis, Rutherford backscattering spectrometry, elastic recoil detectiona analysis