[20a-E312-1~10] 6.2 Carbon-based thin films

▲ [20a-E312-10] On-chip Single Crystal Diamond MEMS with Electrical Actuation and Sensing

〇Meiyong Liao¹, Liwen Sang¹, Masataka Imura¹, Satoshi Koizumi¹, Yasuo Koide¹ (1.Nattional Institute for Materials Science)

Keywords:MEMS, Transducer, Diamond

In order to fulfill the functionalities of single diamond NEMS/MEMS, all-electrical on-chip transducers with all-electrical sensing and actuation are necessary to provide electrical interfaces with integrated circuits.In the present work, we describe the on-chip single crystal diamond NEMS/MEMS by proposing a universal signal transduction scheme called self-sensing enhancing actuation (SEA) with electrically integrated actuation and sensing. In the SEA scheme, the sensing part enhances the actuation force, and in turn, its own sensitivity. The on-chip SCD NEMS/MEMS shows the features of self-sensing, low-voltage actuation (mV), little energy dissipation, and high-frequency (> MHz) and high-temperature operation (873 K).