[20a-PB4-1~10] 22.1 Joint Session M "Phonon Engineering"

[20a-PB4-3] Si-NW width dependency of TE power of Si-NW µ-TEG

〇Shuhei Hirao¹, Hiroki Takezawa¹, Kohei Mesaki¹, Takeo Matsuki^1,2, Takashi Matsukawa², Motohiro Tomita¹, Takanobu Watanabe¹ (1.Waseda Univ., 2.AIST)

Keywords:semiconductor, thermoelectric generator, phonon engineering