2:30 PM - 2:45 PM
[20p-B11-3] Measurement of negative ions using retarding field energy analyzer with magnetic filter
Keywords:retarding field energy analyser, ion energy distribution, magnetron sputtering
In order to understand the substrate incident ion energy distribution in sputtering deposition of metal-doped ZnO target, we developed a multigrid reflection field energy analyzer (RFEA) with a magnetic filter and investigated its basic operating characteristics. In DC magnetron discharge, it was confirmed that high energy negative ions corresponding to the DC voltage applied to the target were incident on the substrate.