[20p-C207-1~16] 11.2 Thin and thick superconducting films, coated conductors and film crystal growth

△ [20p-C207-16] Micro-Fabrication of NdFeAs(O,F) Thin Films and Evaluation of the Transport Properties for Future Particle-Detector Application

〇Yasunari Tsuji¹, Keisuke Kondo¹, Takafumi Hatano¹, Kazumasa Iida¹, Nobuyuki Zen², Yasunori Mawatari², Hiroshi Ikuta¹ (1.Nagoya Univ., 2.AIST)

Keywords:iron-based superconductor, particle detector, micro-fabrication

NdFeAs(O,F) thin films, which has the highest critical temperature of superconductivity (T_c) among the iron-based superconductors, were fabricated into the submicron wires toward particle detector applications. Single crystalline thin films of NdFeAs(O,F) were grown by a molecular beam epitaxy method. The film was patterned into a 40 nm-thick × 0.35 μm-wide × 10 μm-long wire by employing i-line stepper and Ar ion milling. Almost no degradation of T_c during process was observed in the device.