The 80th JSAP Autumn Meeting 2019

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6 Thin Films and Surfaces » 6.4 Thin films and New materials

[20p-C310-1~16] 6.4 Thin films and New materials

Fri. Sep 20, 2019 1:45 PM - 6:00 PM C310 (C310)

Tetsuo Tsuchiya(AIST), Takayuki Ishibashi(Nagaoka Univ. of Tech.)

5:00 PM - 5:15 PM

[20p-C310-13] Copper coating using metal-EDTA complex solution with strong heat process of H2-O2 flame

〇Takuya Kudo1, Atsushi Nakamura2,1, Keiji Komatsu1, Hidetoshi Saitoh1 (1.Nagaoka Univ. Tech., 2.Chubu Chelest Co.,Ltd)

Keywords:metal-EDTA complex solution, strong heat process, copper coating