[20p-E305-1~7] 2.3 Application, radiation generators, new technology

[20p-E305-1] Evaluation of imaging spectroscopic performance of backside-illuminated CMOS sensor for cosmic X-ray observation

〇Hiroshi Nakajima¹, Hikari Kashimura¹, Junko Hiraga², Daito Yuhi², Masayuki Yoshida², Yuichiro Ezoe³ (1.Kanto Gakuin Univ., 2.Kwansei Gakuin Univ., 3.Tokyo Metro. Univ.)

Keywords:X-rays, CMOS

We evaluate spectroscopic imaging performance of back-side illumination type CMOS sensor that is originally developed as a visible light sensor. Spectrum of a monochromatic X-rays with the energy of 22.1keV was obtained with the sensor cooled down to -30 degC. The energy resolution is dE/E = 4.3%, which is better than that we obtained with CCD+CsI sensor of 4.6% at -70 degC. We also report other performances of the sensor such as dark currents.