2:15 PM - 2:30 PM
△ [20p-E305-3] Pt coating for X-ray optics using plasma atomic layer deposition
Keywords:atomic layer deposition, X-ray optics, dry etching
We have been developing an ultra lightweight X-ray optic based on MEMS technologies. Curvilinear micropores 20 μm wide are fabricated with dry etching on Si wafer and used the sidewalls as X-ray mirrors. While Si is relatively easy to be processed, the X-ray reflectivity is smaller than heavier materials. We focused on atomic layer deposition using O2 plasma and demonstrated smooth Pt coating for micropores. We will report on fabrication and evaluation methods for Pt-coated X-ray optics.