The 80th JSAP Autumn Meeting 2019

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Oral presentation

15 Crystal Engineering » 15.4 III-V-group nitride crystals

[20p-E310-1~21] 15.4 III-V-group nitride crystals

Fri. Sep 20, 2019 1:15 PM - 7:00 PM E310 (E310)

Narihito Okada(Yamaguchi Univ.), Yoshio Honda(Nagoya Univ.), Tomoyuki Tanikawa(Osaka Univ.)

1:15 PM - 1:30 PM

[20p-E310-1] High-speed Homoepitaxial Growth of AlN by HVPE and Its Influences on Crystalline Quality

〇Daichi Saito1, Yudai Shimizu1, Nao Takekawa1, Ken Goto1, Toru Nagashima2, Reo Yamamoto2, Bo Monemar3, Yoshinao Kumagai1,4 (1.Tokyo Univ. of Agri. and Tech., 2.Tokuyama Corporation, 3.Linkoping Univ., 4.TUAT IGIR)

Keywords:AlN, HVPE, High-speed Homoepitaxial Growth