[20p-E312-1~14] 6.2 カーボン系薄膜

△ [20p-E312-1] Diamond Surface Patterning by Nickel Imprint Technique under High Temperature Hydrogen Atmosphere

〇(DC)Taira Tabakoya^1,2、Kazuto Sakauchi¹、Masatsugu Nagai¹、Yuto Nakamura¹、Tsubasa Matsumoto¹、Takao Inokuma¹、Norio Tokuda^1,2、Hiromitsu Kato²、Yukako Kato²、Masahiko Ogura²、Daisuke Takeuchi²、Toshiharu Makino²、Satoshi Yamasaki^1,2 (1.Kanazawa Univ. for Kanazawa University、2.AIST for National Institute of Advanced Industrial Science and Technology)

キーワード：Diamond, Nickel, Surface Patterning