The 80th JSAP Autumn Meeting 2019

Presentation information

Print

Oral presentation

6 Thin Films and Surfaces » 6.2 Carbon-based thin films

[20p-E312-1~14] 6.2 Carbon-based thin films

Fri. Sep 20, 2019 1:30 PM - 5:30 PM E312 (E312)

Takatoshi Yamada(AIST), Tsuyoshi Yoshitake(Kyushu Univ.)

5:00 PM - 5:15 PM

[20p-E312-13] The highly efficient p-type B doping into type IIa diamond substrate by 11B+ ion implantation at room temperature and subsequent annealing at 1150°C and 1300°C

〇Yuhei Seki1, Yasushi Hoshino1, Jyoji Nakata1 (1.Kanagawa Univ.)

Keywords:Ion implantation, p-type diamond, Hall effect