[20p-E312-1~14] 6.2 Carbon-based thin films

[20p-E312-4] Electron-Spin-Resonance Detection of Strained Phosphorus Donor (NIMS1 Center)

〇(D)Chikara Shinei¹, Hiromitsu Kato², Toshiharu Makino², Satoshi Yamasaki², Satoshi Koizumi³, Takahide Umeda¹ (1.Univ. of Tsukuba, 2.AIST, 3.NIMS)

Keywords:diamond, phosphorus donor, Electoron-Spin-Resonase

Phosphorus as donor is key for fabricating n-type diamond epitaxial layer. Katagiri et.al. detected ESR center originating from phosphorus donor and called this center "NIMS1 center" in 2004. In phosphorus doped silicon with the same band structure as diamond, phosphorus donor is well known as a typical ESR center.
Even in phosphorus doped silicon carbide with different band structure from diamond, the analogous ESR center can be detected.
On the other hand, it is well known that ESR spectrums are sensitive to strain in the crystal.
We focused on the strain in diamond and discussed behavior of NIMS1 center as to the strain.