[20p-E312-1~14] 6.2 Carbon-based thin films

[20p-E312-7] Boron Doping Effects on Mechanical Properties of Ultrananocrystalline Diamond/Amorphous Carbon Composite Films Deposited on Cemented Carbide Substrates by Coaxial Arc Plasma Deposition

〇Tsuyoshi Yoshitake¹, Mohamed Egiza², Kouki Murasawa³, Ali M. Ali⁴, Yasuo Fukui³, Hidenobu Gonda³, Masatoshi Sakurai³ (1.Kyushu Univ., 2.Kafrelsheikh Univ., 3.OSG Corporation, 4.Al-Azhar Univ.)

Keywords:nanocryystallije diamond, hard coating, coaxial arc plasma deposition

Ultrananocrystalline diamond/amorphous carbon composite (UNCD/a-C) film, wherein a significant number of diamond grains (diameters <10 nm) are embedded in an amorphous carbon matrix, is a new hard coating material for cemented carbide (WC-Co) cutting tools. In our previous study, we have realized the formation of UNCD/a-C films having the hardness of 50 GPa. It has been reported that boron doping facilitates the growth of diamond grains. In this study, to enhance the hardness further, boron doping effects on the structural and mechanical properties of UNCD/a-C films were investigated.