4:45 PM - 5:00 PM
[20p-E314-13] Discussion on Proton-Induced Three Center Bond and Photodegradation
Keywords:amorphous Si, photodegradation, proton
Discussion on photodegradation behavior of positively charged three center bond (PCTCB) that is formed by proton coming onto the growing surface is presented. When PCTCB captures the conduction electron, fission of PCTCB takes place to form additional Si-H bonding, since the three center bond is unstable in its neutral state.