Silicon Heterojunction Solar Cells Analyzed by Atom Probe Tomography

Yasuo Shimizu; Bin Han; Naoki Ebisawa; Yoshinari Ichihashi; Taiki Hashiguchi; Hirotaka Katayama; Mitsuhiro Matsumoto; Akira Terakawa; Koji Inoue; Yasuyoshi Nagai

Presentation information

Oral presentation

16 Amorphous and Microcrystalline Materials » 16.3 Bulk, thin-film and other silicon-based solar cells

[20p-E314-1~14] 16.3 Bulk, thin-film and other silicon-based solar cells

Fri. Sep 20, 2019 1:30 PM - 5:15 PM E314 (E314)

Mitsuhiro Matsumoto(Panasonic), Ryosuke Ishikawa(Tokyo City Univ.)

2:00 PM - 2:15 PM

[20p-E314-3] Silicon Heterojunction Solar Cells Analyzed by Atom Probe Tomography

〇Yasuo Shimizu¹, Bin Han¹, Naoki Ebisawa¹, Yoshinari Ichihashi², Taiki Hashiguchi², Hirotaka Katayama², Mitsuhiro Matsumoto², Akira Terakawa², Koji Inoue¹, Yasuyoshi Nagai¹ (1.IMR Tohoku Univ., 2.Panasonic Corp.)

Keywords:atom probe, focused ion beam, doping

原子レベルの位置分解能で実空間上の元素分布評価が可能である３次元アトムプローブ法をテクスチャ構造の薄膜シリコン太陽電池に適用する実験体系を構築するとともに，異なるホウ素添加条件：(CH₃)₃BおよびB₂H₆による差を検証した．